Which Plasma Parameters Need Measuring?
Though invisible, plasma parameters directly determine process results. 'Controllable, repeatable, optimizable' means measuring plasma parameters - and most of them ultimately appear as specific current or voltage waveforms and values. In two parts: what to measure, and why in current/voltage form - and where the difficulty lies.
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Plasma Applications in Semiconductor Manufacturing
Plasma has become a core enabling technology in semiconductor manufacturing, surface engineering, environmental treatment and aerospace.
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Plasma and Pulsed-Power Applications
Pulsed-discharge plasma serves national energy-saving goals and is widely used across the economy and defense: from biomedical devices, solar backsheets, flexible circuits, nanophotonics, free-electron lasers and plasma thrusters to the treatment of waste gas, waste water and organic pollutants. Research is advancing fast, with distinctive directions such as atmospheric-pressure DBD, nanosecond pulsed discharge and plasma jets.
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